Item Specifics
| Seller Item Code | EQ25P08 | Vintage | 2005 |
|---|---|---|---|
| Wafer size | 300MM |
| Seller Item Code | EQ25P08 | Vintage | 2005 |
|---|---|---|---|
| Wafer size | 300MM |
| 1. Product Name & Description | NV-GSD |
| 2. Equipment manufacturer | Axcelis |
| 3. Configuration & Features | HE3 |
| 4. Process | Implant High-Energy |
| 5.Equipment list |
Ion source Module + vacuum system Module + HV / Power & Control System + Beamline / LINAC |