Item Specifics
| Seller Item Code | EQ25E31 | Vintage | 2015 |
|---|---|---|---|
| Wafer size | 300MM |
| Seller Item Code | EQ25E31 | Vintage | 2015 |
|---|---|---|---|
| Wafer size | 300MM |
| 1. Product Name & Description | 2300 E5 |
| 2. Equipment manufacturer | LAM |
| 3. Configuration & Features | Flex FXP |
| 4. Process | Reactive Ion Etching |
| 5.Equipment list |
EFEM x1 MF x1 Flex FXP CHAMBER x4 Gas Delivery Module x1 GAS Box x4 ESC ( 839-A25668-001 ) x4 |